Engineered Substrates for Radiation-Hard Sensors in High Energy Physics

Active pixel sensors have been developed and implemented in a wide array of applications, including image sensors for cameras, sensors for medical imaging, and as detectors for nuclear physics investigations with the Relativistic Heavy Ion Collider and the Large Hadron Collider. Many of these applications, including high energy physics detectors, medical imaging sensors, and sensors for aerospace and defense applications, must have high speed data readout and radiation hardness against upset or damage. Caporus is developing a new type of engineered semiconductor substrate with superior high frequency performance for high-speed active pixel sensors. The unique properties of these substrates will improve active pixel sensors by increasing data speeds, increasing radiation hardness, improving sensitivity, and reducing charge accumulation. The phase II effort will demonstrate Caporus’ structured semiconductor materials in substrates for the unique needs of high energy physics (HEP) detectors. Caporus will implement its processes and materials for the moderate detector depth and small pixel pitch requirements to implement monolithic active pixel sensors (MAPS) for HEP. The detector performance metrics, such as spatial resolution, time resolution, and radiation hardness can be improved through the incorporation of substrate-defined features defining the detector volume. In collaboration with Fermi National Accelerator Laboratory, the fabrication and testing of devices leading to high energy physics detectors will be demonstrated. After this program, Caporus will provide a new substrate platform on which high energy physics can build active pixel sensors and a multitude of other devices. Caporus’ new substrates will provide enabling capabilities for applications that require radiation hardness and/or RF performance. By working with customers and US-based foundries, the substrates will be a platform for innovation in science, defense, transportation, and communications.