Engineered Substrates for Radiation-Hard Sensors in High Energy Physics

Active pixel sensors have been developed and implemented in a wide array of applications, including image sensors for cameras, sensors for medical imaging, and as detectors for nuclear physics investigations with the Relativistic Heavy Ion Collider and the Large Hadron Collider. Many of these applications, including high energy physics detectors, medical imaging sensors, and sensors for aerospace and defense applications, must have high speed data readout and radiation hardness against upset or damage. Caporus is developing a new type of silicon-on-insulator substrate with superior high frequency performance for high-speed active pixel sensors. The unique properties of these substrates will improve active pixel sensors by increasing data speeds, increasing radiation hardness, improving sensitivity, and reducing charge accumulation. The phase I effort will demonstrate the feasibility of implementing Caporusĺ structured porous materials in engineered substrates for the unique needs of high energy physics (HEP) detectors. Caporus will adapt its deposition processes and materials for the moderate detector depth and small pixel pitch requirements to implement monolithic active pixel sensors (MAPS) for HEP. The high-speed performance of devices fabricated on SOI substrates incorporating Caporusĺ technology will be measured, and the refractive index of the porous layer will be evaluated for application in silicon photonics. Through the feasibility demonstration of the phase I effort, the fabrication and testing of devices for high energy physics detector development will be possible in phase II with Fermilab and other partners. After this program, Caporus will provide a new substrate platform on which high energy physics can build active pixel sensors and a multitude of other devices. Caporusĺ new substrates will provide enabling capabilities for applications that require radiation hardness and/or RF performance. By working with customers and US-based foundries, the substrates will be a platform for innovation in science, defense, transportation, and communications.