Jet Vapor Deposition as a High-Rate, Low-Cost Process for Integrated High Tc Superconductors and Ferrite Circulators in

High temperature superconducting (HTS) thin films have important near-term potential for application in multi-chip modules (MCMs). Furthermore, recent developments in magnetic ferrite films for integrated microwave devices offer process compatibility with HTS MCMs. For instance, the incorporation of monolithic ferrite circulators in HTS MCMs will permit sighnificant weight and size savings along with yield improvements. Manufacturability and cost, however, are still major issues for both defense and commercial applications. Thick ferrite films (50~150) are desirable for microwave devices; unfortunately, the low deposition rates of conventional thin film processes do not permit economical manufacturing throughput. Jet Process Corporation (JPC) proposes to develop its innovative, patented, high-rate, low-cost, pollution-free Jet Vapor Depostion (JVD) process for manufacture of high quality HTS thin films and thick nickel zinc ferrite films for microwave circulators integrated in MCMs. In Phase I we will develop JVD process for deposition of YBCO superconducting thin films and thick nickel zinc ferrite films on GaAs substrates. We will prepare and evaluate JVD YBCO microstrip and ferrite circulators. Film characterization and device performance measurements will be carried out in collaboration with Dr. Gerald F. Dionne of Lincoln Laboratory, a leading expert in the fields of HTS and microwave ferrites, and Dr. Daniel Donoghue of Alpha Industries, Inc. In Phase II, we will design and fabricate a prototype composite structure, in which circulators made from thick ferrite films will be intergrated with HTS interconnects, in collaboration with the ARPA Ferrite Development Consortium. Phase II will thereby demonstrate the feasibility of manufacturing low cost HTS MCMs and ferrite circulates, thus leading to Phase III commercialization. ANTICIPATED BENEFITS: JVD processes for HTS MCMs and ferrites for microwave integrated circuits (MMICs) have great potential: 1) Military: active phase array radars, expendable decoys, navigation, missiles, 2) Commercial: commerciations, automobile radar and anti-collision system, local area networks, cellular radio