SBIR/STTR Research Award
HIGH ACCURACY FLOW CONTROLLER FOR PROCESS CONTROL OF CHEMICAL VAPOR DEPOSITION
Award amount
$300,000Program and phase
SBIR · Phase IIAward year
1995Award details
- Awarding agency
- National Science Foundation
- Branch
- Not reported
- Recipient company
- PHYSICAL SCIENCES INC.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- RMG1AZ1ZH8Q7
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
RESEARCHERS ARE DEVELOPING A COMPACT FLOW SENSOR FOR HIGH ACCURACY SEMICONDUCTOR PROCESS CONTROL. THIS SENSOR IS BASED ON A NEW VARIATION OF INFRARED (IR) ABSORPTION SPECTROSCOPY CALLED SPECTRAL CORRELATION DETECTION. THE REACTANT CONCENTRATION IS QUANTIFIED BY IR ABSORPTION TO CONTROL REACTANT FLOW RATES FOR DEPOSITION OR ETCHING APPLICATIONS. THIS DIRECT IR MESUREMENT CONTRASTS WITH CURRENT METHODS WHICH INDIRECTLY METER SPECIS FLOW RATES. WHILE THE SYSTEM IS ASSEMBLED AND CALIBRATED FOR MODEL METAL ALKYL COMPOUNDS, SUCH AS TRIMETHYLGALLIUM, THIS IR SENSOR IS VERSATILE AND CAN BE APPLIED TO A WIDE VARIETY OF DEPOSITION OR ETCHING SPECIES.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Off-axis Laser Event Recorder (OALER)
- TFLN Interconnect for Gigabit-rate Environment Ruggedization (TIGER)
- Advanced Ruggedized Modulators for Onboard Receivers (ARMOR)
- Modular Bypass Valve for Solid Fuel Ramjets
- Bio-inspired Energy Dissipating Structures for Enhanced Airdrop Capabilities
Research funding history
1,763 SBIR/STTR records share this UEI (1983–2026). Reported award amounts total $698,949,224. Reported amounts are not federal obligations.
Phases: Phase I, Phase II, Phase II – Direct to Phase II
Agencies: Department of Defense, National Aeronautics and Space Administration, Department of Health and Human Services, Department of Energy, National Science Foundation, Environmental Protection Agency