SBIR/STTR Research Award

DEVELOPMENT OF THIN REFRACTORY FILMS OF TIB2 BN NBN AND SIC ON FUSED SIO2 CRUCIBLES

Award identifier 0b0c9cebf1e12769e7a2e6c379cbddfb2c3ff26818d2627d2c4436c0f72b7d4cAwarding agency Department of Defense · Air Force

Award amount

$49,996

Program and phase

SBIR · Phase I

Award year

1987

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Award details

Awarding agency
Department of Defense
Branch
Air Force
Recipient company
ULTRAMET
Proposal award date
Not reported
Contract end date
Not reported
UEI
N8ZRMWX85NZ6
Solicitation number
Not reported
Topic code
Not reported

Research abstract

THE ABILITY TO CONTROL UNWANTED IMPURITY LEVELS DURING ELECTRONIC DEVICE FABRICATION IS ESSENTIAL TO ESTABLISHING THE DESIRED PROPERTIES FOR DEVICE RELIABILITY. IN PHASE I ULTRAMET WILL DEMONSTRATE THE FEASIBILITY OF DEPOSITING THIN, ULTRA-HIGH PURITY FILMS OF BN, TIB2, NBN AND SIC ON FUSED SIO2 CRUCIBLES. A SUCCESSFUL COMPLETION OF PHASE I WILL RESULT IN METALLIC IMPURITIES IN THE COATINGS OF 5PPM AND COATING ADHERENCE UNDER CYCLIC CONDITIONS FROM ROOM TEMPERATURE TO 1300 DEG C. BASED ON THE EXTENSIVE CVD EXPERIENCE AT ULTRAMET, WE FEEL THAT THIS PROGRAM HAS A VERY HIGH PROBABILITY OF SUCCESS.

Technology keywords

Not reported

Other awards by this recipient

Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.

Research funding history

380 SBIR/STTR records share this UEI (1983–2025). Reported award amounts total $105,154,309. Reported amounts are not federal obligations.

Phases: Phase I, Phase II, Phase II – Direct to Phase II

Agencies: Department of Defense, National Aeronautics and Space Administration, Department of Energy, National Science Foundation, Department of Transportation, Department of Health and Human Services

Agency intelligence

Department of Defense

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