SBIR/STTR Research Award

Three Axis Interferometer for Distance and Tip-Tilt Measurement

Award identifier b123a7c3305a12c5038182287e9f8470b3a902c18049f9f83765535f6df27c12Awarding agency Department of Commerce · National Institute of Standards and Technology

Award amount

$299,960

Program and phase

SBIR · Phase II

Award year

2009

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Award details

Awarding agency
Department of Commerce
Branch
National Institute of Standards and Technology
Recipient company
Optical Physics Company
Proposal award date
Not reported
Contract end date
Not reported
UEI
NNMCZN2CS7D9
Solicitation number
Not reported
Topic code
Not reported

Research abstract

During the Phase I SBIR project Optical Physics Company (OPC) investigated a three axis interferometer instrument which measures the one dimensional linear translation and the two-dimensional angular deflection in pitch and yaw of a 7 mm mirror 18-23 cm away. Lab demonstrations both before and during the Phase I effort showed performance parameters better than NIST requirements. The Phase I effort also produced the blueprints of the design of a three dimensional nanometrology instrument 3S-NI). Its design is simple and compact, fitting within a 12.5x12.5x10 cm envelope. During the proposed Phase II effort, OPC will build and test 3D-NI. This will be followed by installation and demonstration as part of NIST¿s the calculable capacity metrology environment.

Technology keywords

Not reported

Other awards by this recipient

Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.

Research funding history

70 SBIR/STTR records share this UEI (2001–2021). Reported award amounts total $35,389,096. Reported amounts are not federal obligations.

Phases: Phase I, Phase II, Phase II – Direct to Phase II

Agencies: Department of Defense, National Aeronautics and Space Administration, Department of Commerce, Department of Energy

Agency intelligence

Department of Commerce

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