MicroElectroMechanical (MEM) Millimeter-Wave Control Devices for Affordable Scanning Antennas

The proposed project addresses the development of novel millimeter-wave control device technology. Microelectromechanical (MEM) switches and phase shifters will be developed for scanning antenna applications. The basic MEM switch consists of a tiltable micro vane, signal transmission lines, contact posts, and control voltage lines fabricated on a high resistivity semiconductor wafer. The phase shifters consist of MEM switches and transmissions lines. The MEM device fabrication process is similar to the standard semiconductor metallization process. The new millimeter-wave control device technology features low cost fabrication, low insertin losses, and integrated circuit compatibility. The new millimeter-wave control device technology will enable the development of affordable millimeter-wave systems such as scanning radar, EW, and communication systems. In Phase I, detailed design, development, and computer simulation of switches and phase shifters will be undertaken. Fabrication and testing of integrated circuit MEM switches and phase shifters for Ka-band operations will also be carried out and the proof of concept will be demonstrated.