A New Low-Power MEMS Sensor for Atmospheric CO2 Measurements

75232-Low power, low cost carbon dioxide (CO2) sensors are needed to monitor the global carbon cycle, especially for particular exchanges of carbon from man-made and natural sources. The sensors must be small and lightweight in order to be compatible with flight in balloonsondes. This project will develop prototype sensor systems with MEMS (microelectromechanical systems) microcapacitor sensor arrays that can monitor atmospheric CO2 concentrations with 1 ppm sensitivity. The measurement will be accomplished by filling the sensors with chemoselective sol-gels whose electric permittivity changes when exposed to CO2. The sensor systems will be battery and remotely operated, portable, and will be able to compensate for changes in humidity, temperature, and pressure. Phase I will demonstrate the feasibility of developing the novel sol-gel-based MEMS sensor arrays. The sensors will be characterized in the laboratory for sensitivity, selectivity, and ruggedness to the humidity, temperature, and pressure variations expected in the atmospheric environment. Commercial Applications and Other Benefits as described by the awardee: In addition to their application for atmospheric monitoring, these sensor systems should find applications in HVAC monitoring, industrial process control, and industrial health and safety.