R&D to enable Scanning Microwave Impedance Microscopy for metrology in advanced FAB?s Measurement technology for in-line Metrology which has applications in materials purity, electrical properties

PrimeNano Inc. has established itself as the market leader in Scanning Microwave Microscopy (ScanWaveTM) worldwide. The technology allows for direct measurement of electrical properties of materials on the nanoscale with unprecedented sensitivity (0.075 attofarad). Currently the technology is available on complex scientific benchtop AFM instruments. The primary objective of this project is to develop the ScanWaveTM technology to work with fully automated wafer handling FAB AFM systems, specifically for metrological applications. Today’s metrology solutions primarily rely on indirect (proxy) measurements of electrical material properties and are typically unable to resolve sub-10nm. To be able to directly measure electrical material properties like dopant level, dielectric films, gate oxide variations (and other solutions) will allow time and cost savings in advanced Semiconductor processes. This approach will enable the industry to develop and implement metrology protocols and solutions based on non-destructive, direct wafer measurements. It is applicable to a broad spectrum of materials and encompasses sub-surface capabilities.