Microfabricated vacuum-packaged Rb vapor cells with tight temperature control

This project develops a fabrication process for vacuum-packaged MEMS atomic vapor cells with tight temperature control. The package   processes and materials are compatible with packaging of highly sensitive magnetometers. The cells will be AR coated and include two independent means of temperature sensing. The package features electrical feedthroughs for heaters and temperature sensors. An important focus will be placed on manufacturability in large volumes and at low cost. In addition, these packaged cells should be useful for a variety of vapor-cell based quantum sensors.