Calibrated, MHz-Bandwidth, Dynamic Pressure Sensors for Quantitative Measurements in Hypersonic Flows

The Interdisciplinary Consulting Corporation (IC2) proposes the development of a MHz-bandwidth dynamic pressure sensor for hypersonic flow measurement applications. The goal of this program is to develop a scientific-grade pressure sensor using MEMS piezoelectric sensing technology and optimization for bandwidths exceeding 1 MHz to enable wide-band performance, including NIST-traceable calibration throughout the measurement bandwidth. This will be accomplished by combining IC2’s proven MEMS piezoelectric sensor technology and novel reciprocal calibration method with through-silicon-vias (TSVs) to provide high-bandwidth (1 MHz) dynamic pressure sensors with a full frequency-response calibration. The resulting fully calibrated sensor will provide a direct replacement for existing sensors, enabling quantifiable dynamic pressure measurements in high-speed flows which is a critical capability for reduced-scale testing of next-generation hypersonic vehicle and weapons designs. The technology is particularly well suited for use in a variety of Department of Defense (DoD), National Aeronautics and Space Administration (NASA), and other government- and university-owned high-speed ground-test facilities and flight-test articles by providing a robust, reliable, small form-factor sensor.