Beyond Resolution Reconstruction of Surface Metrology Data

The performance of any metrology tool, and the level of confidence in the data obtained, directly depends on the ability to characterize (calibrate) the tool, enabling data processing to mitigate the effects of imperfections of the tool. However, there is no commonly accepted method to characterize the performance of metrology tools or calibrate them with high accuracy. Such characterization is a difficult task; the quality of the measured image (topography) data depends on both the tool itself and the experimental setup, and the interpretation of the results is often subjective and incomplete.We propose to develop a robust methodology and technology to quantitatively characterize metrology instrumentations, and create the first reliable and commercial solution for beyond-resolution reconstruction of 2D surface topology data. The technology will increase the spatial resolution of the metrology data needed for fabrication and optimal usage of the existing optical components in x-ray optical systems, performance simulation of new x-ray space telescopes, and x-ray beamlines under development.