Highly Manufacturable Qubits at 300 mm Wafer Scale

The team of SeeQC, Inc. and SUNY Poly (NY CREATES) aims to develop highly manufacturable superconducting fluxonium qubits at a 300 mm wafer scale. Fluxoniums have a significant advantage over the widely used transmons by having higher coherence times and anharmonicity leading to the higher fidelity gates. The fabrication of fluxoniums is challenging for university shared fabrication facilities.  Our project will bring the fluxonium qubit fabrication to an industrial level by engaging the 300 mm capabilities at NY CREATES / SUNY Poly @ Albany, NY.  We aim to develop and demonstrate highly repeatable, high yield, high uniformity fabrication process using the tailored fluxonium qubit designs optimized for the 300 mm fab line. The qubits would be co-designed to leverage the advantages of advanced process technologies uniquely available in state-of-the-art 300mm wafer fabs. The key elements of the fluxonium qubits - Josephson junctions - will be done using highly scalable cross-junction approach and fabricated using an industrial 193 nm lithography and chemical mechanical polishing (CMP). The qubit design process will be informed by the results of measurements of the fabricated samples at SeeQC’s millikelvin test lab in Elmsford, NY. We will use advanced ANSYS and SONNET software packages and our expertise in designing high quality qubits and resonators. The obtained results will allows us to expand to fluxonium qubit arrays in Phase II.