Broadband Uncooled IR Detector Based OnNano-Electromechanical Systems (NEMS)

This Small Business Innovation Research Phase I project seeks to develop an innovative Nano-electromechanical systems (NEMS) based uncooled broadband detector (NEMS detector) with average with high quantum efficiency over the spectral range of 3micro;m ndash; 50 micro;m and high detectivity. nbsp;This device will have a broadband spectral range to support MWIR to Far IR imaging at high performance. The Phase II work will be continuation of Phase I work to include detector modeling, simulation and optimizations, sensing materials growth and optimization using a process compatible with CMOS process, process development, fabrication of test-structure, and their characterization. Further design optimization will be performed based on experimental and simulation results. In addition, design of detector array will also be carried out which will be scalable to large format array. The Phase II development of the NEMS detector will demonstrate a path toward to commercial development of the device as an uncooled broadband IR detector for NASA applications.