Novel Probes for Tip-Based Atomically Precise Manufacturing

Atomically precise manufacturing is an emerging manufacturing technology in which materials, structures, devices, and finished goods are fabricated such that every atom is positioned at an exactly-specified location relative to the other atoms. However, two factors limiting this technology are the low fabrication yields of probes sharp enough to perform atomically precise manufacturing, and the short performance lifetimes of the suitably-sharp probes. The key goal of this program is to develop a high-yielding process to manufacture probes for atomically precise manufacturing that are both sharp and that have long performance lifetimes. During Phase I, the company investigated novel processes to fabricate scanning tunneling microscope probes with compositions and near-apex geometries designed to give superior atomically precise manufacturing performance. The resulting probes were evaluated using transmission electron microscopy and scanning tunneling microscopy and lithography. Remarkably, the company demonstrated robust probe function in hydrogen depassivation lithography to create nearly 1,500 discrete features on a silicon surface without tip degradation. In Phase II, the company will further refine its processes for making probes with compositions and uniform near-apex geometries that are optimized for robust atomically precise manufacturing. In addition to making probes of uniform composition, the company will explore the fabrication of probes that are coated with chemically inert or ultra-hard coatings. The company will also develop methods to passivate probe surfaces for improved performance and extended shelf life. The atomically precise manufacturing lifetimes of the new probes will be evaluated with the goal of 8 hours of continuous use without loss of atomically-precise performance. Commercial Applications and Other Benefits: The probes to be developed in this project will enable and significantly enhance atomically precise manufacturing. This method is an entirely new kind of manufacturing; its potential technical, economic, and social benefits stem from its ability to enable the creation of materials and devices without defects at the ultimate limit of atomic scale precision. This new manufacturing capability is expected to lead to valuable new products for the electronics, energy, healthcare, and defense sectors in applications such as electronic devices, sensors, and quantum computing.