ON-LINE PURIFIERS FOR CHEMICAL VAPOR DEPOSITION
Advanced Technologies/Laboratories Intl · Department of Energy
Phase II1988$500,000
THE MATERIALS USED IN THIN-FILM PHOTOVOLTAIC CELLS AND MANY OTHER SEMICONDUCTOR DEVICES ARE FREQUENTLY GROWN USING CHEMICAL VAPOR DEPOSITION (CVD) OR OTHER VAPOR-BASED PROCESSES. MANY OF THE PROCESS GASES USED, FOR EXAM…