Flexible Micro- and Nano-Patterning Tools for Photonics

To address the OSD needs for low cost, highly flexible micro- and nano-patterning tools, systems, and methods with excellent durability for multilevel nanophotonic devices and/or dense photonic and optoelectronic components, Luminit, LLC proposes to develop a new computer-controlled Nano-Pattering Tool (NAPA-Tool) to replicate micro- and nano-patterns (sub-100 nm to 100 micron) on both rigid and flexible substrates. This flexible net-shape tooling can be integrated into existing roll-to-roll replication web machines for mass production of photonic devices, with multi-cavities and has controllable surface roughness with very good release properties with a short lead time thereby reducing the manufacturing cost. In Phase I, Luminit will design a NAPA-Tool by replicating micro- and nano-pattern, for example, waveguide structures on both rigid and flexible substrate and testing them for quality of the replication process using the NAPA-Tool, such as morphology and optical transmission. In Phase II, we will optimize the NAPA-Tool, scale-up the fabrication process of metal master, produce prototype samples and perform a cost benefit analysis.