Ultra-Rapid Chemical Mechanical Finishing (UCMF) of SiC Mirrors

The overall goal of the Phase II effort is to develop the novel ultra-rapid chemical mechanical finishing (UCMF) process for SiC mirror manufacturing, and commercialize this process in collaboration with existing vendors using existing equipment infrastructure. Unlike glass and metallic systems, the high hardness and chemical inertness of SiC currently limit the finishing of SiC mirrors to mechanical polishing processes that rely on diamond based slurries. Such processes are characterized by low removal rates and large sub-surface damage that results in multiple step finishing processes. The UCMF technology uses chemical assisted polishing process that rapidly removes SiC by chemically reacting with the surfaces, thereby resulting in ultra- smooth surface finish, and significantly reduced sub-surface damage. The UCMF process has the potential to reduce the processing times and decrease the number of finishing steps, thereby resulting in significant cost and time savings. Sinmat estimates that the successful integration of its UCMF process by existing vendors will result in 50% to 80% savings in SiC mirror finishing processes based on the enhanced removal rates and decrease in processing steps. Sinmat estimates that this project will reach TRL 6/7 levels by the completion of the Phase II program.