THz and Sub-THz MEMS-Fabricated Klystron Amplifier

InnoSys and Purdue University propose to research and develop robust designs for building, implementing and demonstrating a new class of terahertz (THz) vacuum electronic device (VED) power amplifiers and power sources at frequencies in the range of 0.3-3.0 THz (the so-called THz regime) employing advanced micro electro mechanical system (MEMS) technology and processes. There is significant interest in exploiting the THz regime, however, to date there is a lack of THz power sources to so with. The design, implementation and demonstration of this new class of microfabricated VEDs is the core of our response to this STTR solicitation. More specifically, electron gun, radio frequency (RF) slow wave structure, collector, and thermal management of the THz VED will be integrated and fabricated with a combination of MEMS-fabrication processes, including photolithography, deep reactive ion etching, and wafer bonding with sub-micron alignment tolerances. For this STTR program, InnoSys in cooperation with its research institute partner, Purdue University, will address the lack of powerful, compact and tunable sources of terahertz radiation by combining comprehensive simulations with state-of the art MEMS fabrication and 3-dimensional integration to realize a new class of high power THz VED power amplifiers and sources.