THz and Sub-THz MEMS-Fabricated Klystron Amplifier

TrueNano Inc. will develop the process technology of a miniature klystron capable of amplifying sub-mm waves resulting in record power. Our novel approach is based on a novel high current cold cathode and a tunable resonant cavity. Fabrication techniques as those developed for MEMS will be used, resulting in well controlled dimensions, precision alignment and vacuum tight sealing. A monitoring technique is incorporated that enables accurate tuning of the cavities for maximum amplification and output power. The ultimate goal of this project is to design, fabricate and experimentally demonstrate such klystron at frequencies ranging from 0.3 to 3 THz. This proposed structure is expected to meet the program objectives and will result in a compact, high power terahertz amplifier suitable for a multitude of military and commercial applications.