Novel High-Turbine Operational SiCN MEMS Sensor Suite

To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor and track engine health status and failure modes of turbine engines and advanced propulsion systems, miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure and temperature, would be highly advantageous. Of particular interest are hot-section sensors (or an assembly of sensors) that would be positioned closer to the combustor outlet to better assess the high-pressure, and low-pressure turbine component environments and transients. The end objective of this proposed work to develop a single MEMS silicon carbide nitride (SiCN)-based, pressure and temperature sensor, and packaging technology suitable for a wide range of turbine engines applications, capable of wall/gas path temperature sensing, and high-temperature high response speed pressure sensing. Our technical approach is to leverage a proprietary sensor technology based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures (> 1500 oC). Phase II work tasks will include: SiCN process development, several generation a sensor and packaging hardware prototyping, component level testing, and fully integrated module performance testing in both internal and OEM partner (Rolls Royce Corporation) burner rig and engine test systems.