Novel High-Turbine Operational SiCN MEMS Sensor Suite

To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor and track engine health status and failure modes of turbine engines and advanced propulsion systems, miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure and temperature, would be highly advantageous. The end objective of this proposed work to develop a single MEMS silicon carbide nitride (SiCN)-based pressure and temperature sensor, and packaging technology suitable for a wide range of turbine engines applications, with an operational range to 1400°C, and the ability to survive short duration (5-10 minute) temperature excursions to 1800°C. Our technical approach is to leverage a proprietary sensor technology based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. Work tasks will translating the existing technology for this application, including: modifying material formulations, evaluating and defining sensor designs, evaluating and modifying fabrication processes, evaluating and defining the packaging/interface, and proof of principle feasibility experiments. Based on conversations with GE Aviation, for Phase I, we have initially targeted the GE-T64 engine system as the initial representative engine system, and several specific locations of interest within that engine.