Digital Micromirror Device Detection Scheme for Transmission Scanning Electron Microscopy

Accurate quantitative characterization of materials is crucial for a wide range of industrial and research applications. New transmission scanning electron microscopy (t-SEM) methods have the potential for high-resolution imaging similar to transmission electron microscopy (TEM) with a less expensive, more widely available SEM system. In Phase I, RadiaBeam Technologies demonstrated the feasibility of a novel t-SEM detection scheme based on digital micromirror device technology. In Phase II, a prototype detector will be developed and integrated into a standard SEM system. Its synchronization with the scanning beam, as well as its ability to perform transmission electron diffraction imaging, dark-field imaging, and angular selection will be demonstrated and characterized.