SBIR/STTR Research Award

Molecular Layer Chemical Vapor Deposition for Advanced Metallization

Award identifier 112ab62d9d0dd61c1ebd79d38cfed9b4d7c2c6d586e0333e0c2d9581e10a837bAwarding agency National Science Foundation

Award amount

$91,960

Program and phase

SBIR · Phase I

Award year

1999

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Award details

Awarding agency
National Science Foundation
Branch
Not reported
Recipient company
TimeDomain CVD Inc
Proposal award date
Not reported
Contract end date
Not reported
UEI
REJ2GMYAKAA7
Solicitation number
Not reported
Topic code
Not reported

Research abstract

N/A

Technology keywords

Not reported

Other awards by this recipient

Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.

Research funding history

6 SBIR/STTR records share this UEI (1998–2009). Reported award amounts total $587,963. Reported amounts are not federal obligations.

Phases: Phase I

Agencies: National Science Foundation, Department of Defense

Agency intelligence

National Science Foundation

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