Polymer based 3-D micro-machined sub-THz waveguide for CMOS integration

Prixarc working with University of Miami and Kansas State University propose to develop and commercialize systems and technology that rely on low-loss coupling of sub-terahertz radiation between a Complementary metal–oxide–semiconductor (CMOS) integrated chip and a hermetically sealed waveguide operating in the 200-300 GHz frequency range. To achieve the required device specifications, we propose an integrated horn antenna (Tx/Rx) waveguide to miniaturize the combined CMOS plus waveguide. This novel approach will minimize the internal device losses from the multiple alignments, interconnection, and material mismatch encountered during the multi-procedure fabrications. We will adopt a fine continuous 3D microlithography. This fabrication technology will use tiltable ultra-violet (UV)-LEDs associated with fine continuous Z-stage movement and enables the creation of various 3D microstructures on a scale ranging from several hundred microns to a millimeter. During Phase I, we will conduct a design study that includes a trade space analysis and adequate detail and fidelity modeling of waveguide performance to demonstrate the possibility of achieving the performance objectives. This involves designing the waveguide with sufficient test structures to demonstrate the needed CMOS-to-waveguide coupling efficiency, the waveguide and the specifics of its fabrication, as well as the mechanical construction and integration technique.