Backside Inspection Frontside Electrical Stimulation System

Infrared Laboratories proposes a direct to phase II program for delivering an electrical stimulation system to be used with DMEA’s existing IREM backside inspection system. Our delivered system will operate using proven technology that we will develop to work with DMEA’s existing tool. The system will be capable of using probe cards as well as individual micro manipulated probe tips to stimulate full wafers, wafer pieces, bare die and prepared packaged parts. Our solution will be capable of using air gap, LIO and SIL objective lenses, with some limitations based on the sample under test. The system will be capable of precisely positioning the sample under test as well as the probe card and/or probe tips used to stimulate the DUT. The system will be integrated into the backside inspection control software and is also planned to have manual alignment capabilities.