Through-Lens Fiducial Marking System

Through-lens laser fiducial marking systems can greatly increase throughput of semiconductor Failure Analysis (FA) labs, that do not have access to CAD drawings of the devices they are trying to analyze.  Creating fiducial marks at points of interest on a semiconductor device allows the device to move and be analyzed by different FA equipment easily and quickly. In Phase I, a suitable laser was tested and proved to mark within required specifications.. Phase II will integrate the marking laser onto an IREM-II microscope system. The currently installed lens slide system will also be upgraded to a lens turret with auxiliary optics assembly to facilitate integration of the marking laser. In addition to supporting the marking laser the lens turret will also provide several other advantages over the current optics slide. During this Phase-II project we will develop and deliver a working prototype system to the project sponsor.