Navigation-Grade Micro-Electro-Mechanical-System (MEMS) Accelerometer Technologies

InertialWave, Inc. will complete the design and analysis of a Dual Resonant Beam Accelerometer in MEMS vacuum wafer level package process integrated with IW’s navigation grade frontend ASIC controller in Phase I. IW will further demonstrate feasibility through analysis and testing of the DRBA design with the ASIC controller to achieve navigation grade performance in a small volume (<50mm2), at very low power (<3mW/accelerometer), while operating in representative Army’s environments. In Phase II IW plans to fabricate the DRBA and integrate with the ASIC controller in planar 2-axis and ultra compact 3-axis configurations and conduct inertial testing in representative environments. The end of this project will result in a rapid transition to DoD applications.