BULK-DENSITY AL(2)O(3) THIN FILMS BY ION BEAM ENHANCED DEPOSITION
Spire Corporation · Department of Defense
Phase I1989$49,994
ALUMINUM OXIDE IS A WIDELY USED CERAMIC EXHIBITING A NUMBER OF ATTRACTIVE BULK PROPERTIES INCLUDING CHEMICAL NERTNESS, HIGHTEMPERATURE COMPATIBILITY, AND HIGH DIELECTRIC STRENGTH. UNFORTUNATELY, THESE PROPERTIES CANNOT…