Liquid Metal Cluster Ion Source For Repair Of Packaging
SI Diamond Technology Inc · Department of Defense
Phase I1993$51,045
WE PROPOSE THE DEVELOPMENT OF A DIRECT METAL ETCH AND WRITE (DMEW) TECHNOLOGY BASED ON RECENTLY DEVELOPED LIQUID METAL CLUSTER ION SOURCES (LMCIS) FOR REPAIR OF CONDUCTING PATHS IN POLYCERAMIC SYSTEM. THE LMCIS'S ADVANT…