Low-Dose Low-Energy SIMOX for Fully Depleted Silicon-on-Insulator (SOI)
IBIS TECHNOLOGY CORP. · Department of Defense
Phase II1998$100,000
A program is proposed to investigate and develop thin buried oxide (BOX) SIMOX with quality of silicon and BOX layers suitable to support fully depleted SOI applications with minimum feature size at and below 0.18 um. I…