SBIR/STTR Research Award
Novel Low-Cost Methods for Fabricating Compact, Vertically Integrated MEMS
Award amount
$750,000Program and phase
SBIR · Phase IIAward year
2006Award details
- Awarding agency
- Department of Defense
- Branch
- Defense Advanced Research Projects Agency
- Recipient company
- SENSORCON, INC.
- Proposal award date
- 2006-03-21
- Contract end date
- 2008-07-01
- UEI
- Not reported
- Solicitation number
- 2004.3
- Topic code
- SB043-036
Research abstract
Sensorcon is proposing the developm
Technology keywords
Not reported
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Novel Low-cost Methods for Fabricating Compact, Vertically Integrated MEMS
- Novel Low-cost Methods for Fabricating Compact, Vertically Integrated MEMS
- Novel Low-cost Methods for Fabricating Compact, Vertically Integrated MEMS