Novel Low-cost Methods for Fabricating Compact, Vertically Integrated MEMS

Vism Corporation proposes to demonstrate a tunable Fabry-Perot filter (TFPF) using a highly innovative MEMS process called Surface Micromachined Bulk Silicon (SUMBS), for applications in RPG or missile threat warning or multispectral imaging systems. The MEMS TFPF employs a novel digital electrostatic actuator made of single crystal silicon that provides high accuracy tuning with ultra compactness, low-weight, and high speed. Further, the SUMBS process technology provides a unique 3-D, vertically integrated architecture that gives rise to small size, low cost, high accuracy, high yield and superior manufacturability.