SBIR/STTR Research Award
Novel Low-cost Methods for Fabricating Compact, Vertically Integrated MEMS
Award amount
$699,842Program and phase
SBIR · Phase IIAward year
2006Award details
- Awarding agency
- Department of Defense
- Branch
- Defense Advanced Research Projects Agency
- Recipient company
- VISM CORP.
- Proposal award date
- 2006-03-02
- Contract end date
- 2008-05-31
- UEI
- Not reported
- Solicitation number
- 2004.3
- Topic code
- SB043-036
Research abstract
We propose to demonstrate tunable Fabry-Perot filter (TFPF) for hyperspectral imaging sub-systems that can be integrated in surveillance, target recognition and threat warning systems. The MEMS TFPF employs a novel electrostatic actuator made that provides high accuracy tuning with compactness, low-weight, digital tuning, and high speed.
Technology keywords
Not reported
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Novel Low-Cost Methods for Fabricating Compact, Vertically Integrated MEMS
- Novel Low-cost Methods for Fabricating Compact, Vertically Integrated MEMS
- Novel Low-cost Methods for Fabricating Compact, Vertically Integrated MEMS