Mass Fabricated Digital Array Micro Thrusters for Miniature Interceptor Divert and Attitude Control Systems (DACS)

"New developments in MEMS-based fabrication concepts permit dense packaging of micro thrusters collocated with the microelectronics required to provide digital control. The MEMS-based DACS is a low-cost approach to providing digital micro propulsion thatgreatly reduces the DACS footprint and mass that miniature interceptors require. This will lead the way for much higher mission performance at less cost for multiple system applications like attitude control for MMKV/MKV, possibly for micro and smallsatellite stationkeeping, and certainly within the emerging family of medium caliber precision-guided autonomous munitions, like Light Fighter Lethality, which may be spin stabilized, and will require digitally-controlled annular DACS.Tanner Research proposes to dramatically reduce the cost to implement digital array micro thrusters by using MEMS fabrication techniques adapted from the microelectronics industry. Thruster fabrication will be done in its entirety at Tanner Research, andwill be facilitated by multiple ongoing projects to develop wafer-based micro cavities. The micro cavities, which are micro thrusters, are currently being tested and evaluated by TACOM-ARDEC for use as micro detonators and MEMS-based safe and arm devices;and, by OSD/WPAFB as a micro thermite device for anti tamper applications. In Phase I, Tanner Research will fabricate micro thrusters on 4-inch silicon wafers, with each wafer containing 200 micro thrusters. Th