Radiation and Shock Hardened, Low Voltage MEMS MicroShutter Array Optimized for Missile Applications

The Navy has identified the need to develop a fast (< 0.1s) global optical imager micro shutter capable of operating in high radiation, strategic environments over 30-year mission timelines.  This proposal addresses the design and development of an enhanced global optical imager micro-shutter array with 532 cells (each 100µ x 200µ) with a total array size of 5.2mm by 4.1mm. This shutter array has addressable cells and is optimized for use on Navy strategic systems: submarine launched ballistic missiles or space craft. International FemtoScience (FemtoSci) proposes a technology with two significant enhancements: An inexpensive CVD deposited diamond film is used as an alternative to silicon nitride in the shutter hinges (flexures) as used by NASA.  Diamond provides stronger, more rugged, and higher modulus of rupture for flexures (10X improvement) over silicon nitride. Diamond has superior radiation performance as well as high thermal conductivity and greater immunity to thermal mechanical shock (TMS). The FemtoSci design provides lower operating voltage for opening / closing shutters, consistent with voltages available in solid-state circuits (5 to 15 V). This is accomplished by integrating electrostatic motors at each of the hinges; the number of motor plates can be varied to adjust the torque.