Development of Large Area Electronic Grade Single Crystal Diamond Wafers

Kyma Technologies, Inc., the leading domestic supplier of single crystal nitride semiconductor substrate materials, and MSU-Fraunhofer CCD, the leading domestic developer of electronic grade diamond materials, are teamed together on Army Research Laboratory SBIR A16-021 to develop the first domestic supply of large area electronic grade single crystal diamond wafers. Our approach to achieve large area diamond wafers is to tile single crystal diamond substrates with close crystallographic alignment and then to deposit a high quality homoepitaxial diamond layer on top – the mosaic approach. The goals of the Phase II program are to generate diamond wafers that are greater than 6 cm^2 in area, and to develop a high fidelity manufacturing process that is capable of producing wafers of progressive larger sizes. The mosaic wafers will be composed of the highest grade diamond substrates available on the market, and will be fabricated using state of the art equipment, and state of the art microwave plasma-assisted chemical vapor deposition and diamond substrate stitching processes.