SBIR/STTR Research Award
Low Cost Nanolithography Techniques Using Elastomer Shrinkage and/or Plasmon Confinement
Award amount
$98,990Program and phase
SBIR · Phase IAward year
2004Award details
- Awarding agency
- Department of Defense
- Branch
- Defense Advanced Research Projects Agency
- Recipient company
- Tanner Research, Inc.
- Proposal award date
- 2004-11-08
- Contract end date
- 2005-07-15
- UEI
- X7KGA99EEDX5
- Solicitation number
- 2004.3
- Topic code
- SB043-045
Research abstract
Nanolithography remains the critical hurdle in developing and commercializing new nanotechnology devices. A low cost nanolithography technique must be developed if the promise of nanotechnology is to be fully realized. Tanner Research and Stanford University are proposing two new nanolithography techniques based on elastomer shrinkage and plasmon confinement. Both of these techniques will be pursued in parallel during Phase I wherein we will demonstrate the proof of concept for lithography at 35-40 nm feature sizes, mitigate the associated risk areas, and develop specific applications for the two techniques.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Compact Sensor for Non-Destructive Propellant Mechanical Property Evaluation
- Title: 270V DC Add-on Upgrade for CMBRE
- Radiation Performance Improvements for EFIs
- Retrofittable Probe Latching Detection Concepts for Unmanned Aerial Refueling
- Novel Subminiature Assembly, MEMS Ultrasound, for implementation of SDPSS
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Innovative Nanoimprint Lithography Mask Technology for Sub-45 nm Features
- Innovative Nanoimprint Lithography Mask Technology for Sub-45 nm Features
Research funding history
185 SBIR/STTR records share this UEI (1987–2025). Reported award amounts total $49,118,132. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, National Science Foundation, Department of Health and Human Services, Department of Energy, Department of Agriculture, National Aeronautics and Space Administration