SBIR/STTR Research Award
HVPE-Based Gallium Oxide Homoepitaxial Structures for RF and Power Switching Devices
Award amount
$750,000Program and phase
SBIR · Phase IIAward year
2019Award details
- Awarding agency
- Department of Defense
- Branch
- Air Force
- Recipient company
- KYMA TECHNOLOGIES, INC.
- Proposal award date
- 2019-02-05
- Contract end date
- 2020-06-08
- UEI
- GDV6R1VLRVN7
- Solicitation number
- 17.1
- Topic code
- AF171-018
Research abstract
Kyma will advance the hydride vapor phase epitaxy (HVPE) growth technology for producing high quality crystalline layers of β-Ga2O3, β-(Al,Ga)2O3, and β-(In,Ga)2O3 layers on single crystal β-Ga2O3 substrates. The electrical and structural quality of these materials will be optimized over a range of doping levels and alloy compositions, and their uniformity across the wafer will also be optimized. These optimized processes will be combined to create state-of-the-art delta-doped β-Ga2O3 field effect transistor epiwafers and modulation doped β-(Al,Ga)2O3/Ga2O3 high electron mobility transistor epiwafers and related test structures for delivery to the Air Force for materials and device level testing and evaluation.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Low-Cost Manufacturing of High Quality GaN Substrates
- Pulsed Sputter Deposition (PSD) for Efficient Doping for GaN HEMT Contacts
- HVPE-Based Gallium Oxide Epiwafer Development
- High Responsivity Optical GaN Switch
- Radiation-Tolerant Vertical GaN Diodes
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Development of Ga2O3 Epitaxial Layers and Heterostructures for Power Device Applications
- Development of Ga2O3 Epitaxial Layers and Heterostructures for Power Device Applications
- HVPE-Based Gallium Oxide Homoepitaxial Structures for RF and Power Switching Devices
Research funding history
83 SBIR/STTR records share this UEI (2000–2024). Reported award amounts total $34,128,798. Reported amounts are not federal obligations.
Phases: Phase I, Phase II, Phase II – Direct to Phase II
Agencies: Department of Defense, Department of Energy, National Aeronautics and Space Administration